请输入您要查询的百科知识:

 

词条 Nanochannel glass materials
释义

  1. Characteristics

  2. Applications

  3. See also

  4. References

  5. Further reading

Nanochannel glass materials are an experimental mask technology that is an alternate method for fabricating nanostructures, although optical lithography is the predominant patterning technique.[1]

Nanochannel glass materials are complex glass structures containing large numbers of parallel hollow channels. In its simplest form, the hollow channels are arranged in geometric arrays with packing densities as great as 1011 channels/cm2. Channel dimensions are controllable from micrometers to tens of nanometers, while retaining excellent channel uniformity. Exact replicas of the channel glass can be made from a variety of materials. This is a low cost method for creating identical structures with nanoscale features in large numbers.[2][3]

Characteristics

These materials have high density of uniform channels with diameters from 15 micrometres to 15 nanometers. These are rigid structures with serviceable temperatures to at least 300 °C, with potential up to 1000 °C. Furthermore, these are optically transparent photonic structures with high degree of reproducibility.

Applications

These can be used as a material for chromatographic columns, unidirectional conductors, Microchannel plate and nonlinear optical devices. Other uses are as masks for semiconductor development, including ion implantation, optical lithography, and reactive ion etching.[2][3][4]

See also

  • E-beam lithography
  • Ion beam lithography
  • Maskless lithography
  • Nanolithography
  • Photolithography
  • Porous glass
  • Vycor glass

References

1. ^{{Cite book |editor-last=Gimzewski |editor-first=James K |editor2=Welland, M.E | title =Ultimate limits of fabrication and measurement | publisher =Springer | date =May 1995 | pages =13, 14, 15 | url =https://books.google.com/books?id=5p3Z1fEI0xwC&pg=PA14&dq=Nanochannel+Glass+Materials&cd=2#v=onepage&q&f=false | isbn =978-0-7923-3504-7}} * Proceedings of the NATO Advanced Research Workshop, Cambridge, U.K., April 1--3, 1994 Series: NATO Science Series E: (closed), Vol. 292
2. ^{{Cite web | title =Nanochannel Glass Materials | publisher =Naval Research Laboratory. Technology Transfer Office, Code 1004 | url =http://www.nrl.navy.mil/techtransfer/fs.php?fs_id=MAT13 | accessdate =2011-07-04}}*{{USGovernment-Navy}}
3. ^{{cite conference |doi=10.1063/1.2821605|title=Materials Characterization and Nanofabrication Methods—Nanochannel Glass Materials|book-title=AIP Conference Proceedings|year=2007|last1=Tonucci|first1=Ronald J.|last2=Hubler|first2=Graham K. |editor-last=Sibilia |editor-first=Concita |editor-last2=Wiersma |editor-first2=Diederik S.|volume=959|pages=59–71|isbn=978-0-7354-0473-1}}
4. ^{{cite journal|doi=10.1126/science.270.5233.68|title=Nanochannel Glass Replica Membranes|year=1995|last1=Pearson|first1=D. H.|last2=Tonucci|first2=R. J.|journal=Science|volume=270|issue=5233|pages=68–70|bibcode = 1995Sci...270...68P }}

Further reading

  • {{cite conference

|doi = 10.1117/12.351044
|url = http://lib.semi.ac.cn:8080/tsh/dzzy/wsqk/SPIE/vol3609/3609-67.pdf
|title = Near-field scanning optical microscopy imaging: theory, simulation, and experiment
|book-title = Proceedings of SPIE
|year = 1999
|last1 = Bryant
|first1 = Garnett W.
|volume = 3609
|pages = 67–75
|series = Optical Pulse and Beam Propagation
|editor1-last = Band
|editor1-first = Yehuda B
|last2 = Liu
|first2 = Ansheng
|deadurl = yes
|archiveurl = https://web.archive.org/web/20120317142550/http://lib.semi.ac.cn:8080/tsh/dzzy/wsqk/SPIE/vol3609/3609-67.pdf
|archivedate = 2012-03-17
|df =
}}
  • {{cite journal

|doi=10.1126/science.270.5233.68
|url=
|title=Nanochannel Glass Replica Membranes
|year=1995
|last1=Pearson
|first1=D. H.
|last2=Tonucci
|first2=R. J.
|journal=Science
|volume=270
|issue=5233
|pages=68|bibcode = 1995Sci...270...68P }}
  • {{US patent|5,976,444}} "Nanochannel glass replica membranes"

4 : Materials science|Glass|Glass engineering and science|Glass applications

随便看

 

开放百科全书收录14589846条英语、德语、日语等多语种百科知识,基本涵盖了大多数领域的百科知识,是一部内容自由、开放的电子版国际百科全书。

 

Copyright © 2023 OENC.NET All Rights Reserved
京ICP备2021023879号 更新时间:2024/9/21 21:51:52