| 词条 | Propylene glycol methyl ether acetate |
| 释义 |
| Name = | ImageFile = PGMEA.svg | ImageSize = | IUPACName = 1-Methoxy-2-propanyl acetate | OtherNames = PGMEA; 1-Methoxy-2-propanol acetate | SystematicName = | Section1 = {{Chembox Identifiers | CASNo_Ref = {{cascite|correct|CAS}} | CASNo = 108-65-6 | UNII_Ref = {{fdacite|correct|FDA}} | UNII = PA7O2U6S2Q | PubChem = 7946 | ChemSpiderID = 7658 | SMILES = CC(COC)OC(=O)C | InChI = 1/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3 | InChIKey = LLHKCFNBLRBOGN-UHFFFAOYAD | StdInChI = 1S/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3 | StdInChIKey = LLHKCFNBLRBOGN-UHFFFAOYSA-N | Section2 = {{Chembox Properties | C=6 | H=12 | O=3 | Appearance = | Density = | MeltingPt = | BoilingPt = | Solubility = | LogP = 0.26[1] | Section3 = {{Chembox Hazards | MainHazards = | HPhrases = {{H-phrases|226|360|402}} | FlashPtC = 43 | AutoignitionPtC = 333 | AutoignitionPt_notes = | NFPA-H = 1 | NFPA-F = 2 | NFPA-R = 0 | Section4 = | Section5 = | Section6 = }}Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA[3] and by Shell Chemical under the name methyl proxitol acetate.[4][5] In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[6] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[7] due to its evaporation into ambient air. References1. ^{{Cite web|url=https://www.chemsrc.com/en/cas/108-65-6_242974.html|title=1-Methoxy-2-propyl acetate_msds}} 2. ^{{cite web|url=http://cameochemicals.noaa.gov/chemical/24058|title=PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA|first=NOAA Office of Response and Restoration, US|last=GOV|publisher=}} 3. ^http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf 4. ^{{cite web |url=http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf |title=Archived copy |accessdate=2014-08-01 |deadurl=yes |archiveurl=https://web.archive.org/web/20140808050817/http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf |archivedate=2014-08-08 |df= }} 5. ^{{cite web|url=http://www.shell.com/global/products-services/solutions-for-businesses/chemicals/products/solvents/chemical-solvents/glycol-ethers/methyl-proxitol.html|title=Methyl PROXITOL|publisher=}} 6. ^{{cite web|url=https://www.microsi.com/product-category/lithography/adhesion-promoters/|title=HMDS primer (hexamethyldisilazane), DEATS and PGMEA|publisher=}} 7. ^http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf 2 : Glycol ethers|Acetate esters |
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