| 词条 | Trichlorofluorosilane |
| 释义 |
| ImageFile = SiCl3F.svg | ImageSize = 150px | SystematicName = Trichloro(fluoro)silane | OtherNames =Silicon trichloride fluoride | Section1 = {{Chembox Identifiers | CASNo =14965-52-7 | PubChem =139862 | ChemSpiderID =123347 }} | Section2 = {{Chembox Properties | Formula = SiCl3F | MolarMass = 153.43 g/mol | Density =1.477g/cm3 }} }}Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1] References1. ^{{cite web | url=https://www.google.com/patents/US7030260 | title=Preparation of mixed-halogen halo-silanes, US 7030260 B2 | accessdate=11 October 2013}} {{inorganic-compound-stub}} 5 : Inorganic silicon compounds|Fluorides|Nonmetal halides|Chlorides|Silanes |
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