“Trichlorosilane”的意思、由来-开放百科全书

词条

Trichlorosilane

释义

Production
Applications
Ingredient in hydrosilylation Organic synthesis
References
External links

{{chembox
| Verifiedfields = changed
| Watchedfields = changed
| verifiedrevid = 470613553
| ImageFile = Trichlorosilane-2D-stereo.png
| ImageSize = 120px
| ImageFileL1 = Trichlorosilane-3D-vdW.png
| ImageFileR1 = Trichlorosilane-3D-balls.png
| IUPACName = trichlorosilane
| OtherNames = silyl trichloride, silicochloroform
|Section1={{Chembox Identifiers
| ChemSpiderID_Ref = {{chemspidercite|correct|chemspider}}
| ChemSpiderID = 23196
| InChI = 1/Cl3HSi/c1-4(2)3/h4H
| InChIKey = ZDHXKXAHOVTTAH-UHFFFAOYAH
| StdInChI_Ref = {{stdinchicite|correct|chemspider}}
| StdInChI = 1S/Cl3HSi/c1-4(2)3/h4H
| StdInChIKey_Ref = {{stdinchicite|correct|chemspider}}
| StdInChIKey = ZDHXKXAHOVTTAH-UHFFFAOYSA-N
| CASNo = 10025-78-2
| CASNo_Ref = {{cascite|correct|CAS}}
| UNII_Ref = {{fdacite|changed|FDA}}
| UNII = QZY2645L6V
| PubChem = 24811
| SMILES = Cl[SiH](Cl)Cl
| EINECS = 233-042-5
| RTECS = VV5950000
| UNNumber = 1295
|Section2={{Chembox Properties
| Formula = HCl₃Si
| MolarMass = {{val|135.45|u=g/mol}}
| Appearance = colourless liquid
| Density = 1.342 g/cm³
| MeltingPtC = -126.6
| BoilingPtC = 31.8
| Solubility = hydrolysis
|Section3={{Chembox Hazards
| ExternalSDS = ICSC 0591
| EUClass = Highly flammable (F+)
Harmful (Xn)
Corrosive (C)
| NFPA-H = 3
| NFPA-F = 4
| NFPA-R = 2
| NFPA-S = W
| RPhrases = {{R12}}, {{R14}}, {{R17}}, {{R20/22}}, {{R29}}, {{R35}}
| SPhrases = {{S2}}, {{S7/9}}, {{S16}}, {{S26}}, {{S36/37/39}}, {{S43}}, {{S45}}
| FlashPtC = -27
| AutoignitionPtC = 185
| ExploLimits = 1.2–90.5%
| PEL =
|Section8={{Chembox Related
| OtherFunction = Chlorosilane
Dichlorosilane
Dichloromethylsilane
Chlorodimethylsilane
Silicon tetrachloride
| OtherFunction_label = chlorosilanes
| OtherCompounds = Trifluorosilane
Tribromosilane
Chloroform
}}Trichlorosilane is an inorganic compound with the formula HSiCl₃. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.^[1]

Production

Trichlorosilane is produced by treating powdered metallurgical grade silicon with blowing hydrogen chloride at 300 °C. Hydrogen is also produced, as described in the chemical equation:

Si + 3 HCl → HCl₃Si + H₂

Yields of 80-90% can be achieved. The major byproducts are silicon tetrachloride (chemical formula SiCl₄), hexachlorodisilane (Si₂Cl₆), and dichlorosilane (H₂SiCl₂), from which trichlorosilane can be separated by distillation.

It is also produced from silicon tetrachloride:^[2]

Si + 3 SiCl₄ + 2 H₂ → 4 HSiCl₃

Applications

Trichlorosilane is the basic ingredient used in the production of purified polysilicon.

HSiCl₃ → Si + HCl + Cl₂

Ingredient in hydrosilylation

Via hydrosilylation, trichlorosilane is a precursor to other useful organosilicon compounds:

RCH=CH₂ + HSiCl₃ → RCH₂CH₂SiCl₃

Some useful products of this or similar reactions include octadecyltrichlorosilane (OTS), perfluoroctyltrichlorosilane (PFOTCS), and perfluorodecyltrichlorosilane (FDTS). These reagents used in surface science and nanotechnology to form Self-assembled monolayers. Such layers containing fluorine decrease surface energy and reduce sticking. This effect is usually exploited as coating for MEMS and microfabricated stamps for a nanoimprint lithography (NIL) and in injection molding tools.^[3]

Organic synthesis

Trichlorosilane is a reagent in the conversion of benzoic acids to toluene derivatives. In the first step of a two-pot reaction, the carboxylic acid is first converted to the trichlosilylbenzyl compound. In the second step, the benzylic silyl derivative is converted to the toluene derivative with base.^[4]

References

1. ^Lianhong Xu, Ravi Kurukulasuriya, "Trichlorosilane" Encyclopedia of Reagents for Organic Synthesis, 2006. {{DOI|10.1002/047084289X.rt213.pub2}}
2. ^{{ Ullmann | author = Simmler, W. | title = Silicon Compounds, Inorganic | doi = 10.1002/14356007.a24_001 }}
3. ^{{cite journal|vauthors = Cech J, Taboryski R |title = Stability of FDTS monolayer coating on aluminum injection molding tools|journal = Applied Surface Science|volume = 259|pages = 538–541|year = 2012|doi = 10.1016/j.apsusc.2012.07.078|url = http://www.sciencedirect.com/science/article/pii/S0169433212012688}}
4. ^George S. Li, David F. Ehler, R. A. Benkeser "Methyl Groups By Reduction Of Aromatic Carboxylic Acids With Trichlorosilane - Tri-n-propylamine: 2-methylbiphenyl" Org. Synth. 1977, volume 56, pp. 83. {{DOI|10.15227/orgsyn.056.0083}}

[https://web.archive.org/web/20050313163014/http://www.osha.gov/SLTC/semiconductors/substratemfg/polysiliconprod.html Semiconductors: Silicon: Substrate Manufacture: Polycrystalline silicon Production]

External links

2 : Silanes|Chlorides

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