| 词条 | Burn-Jeng Lin |
| 释义 |
Burn-Jeng Lin ({{zh|t=林本堅}}; born 1942) is a Taiwanese engineer. EducationLin earned his doctorate from Ohio State University in 1970.[1] CareerWhile working for IBM, Lin became the first to propose immersion lithography, a technique that became viable in the 1980s.[2][3] Lin left IBM to found his own company, Linnovation, Inc., in 1992. He began working for TSMC in 2000.[4] Lin was named an IEEE Fellow in 2003, and granted an equivalent honor by the SPIE. The next year, SPIE gave Lin the inaugural Frits Zernike Award.[5] In 2008, Lin was elected to membership of the United States National Academy of Engineering "[f]or technical innovations and leadership in the development of lithography for semiconductor manufacturing."[6] Lin received the IEEE Cledo Brunetti Award and IEEE Jun-ichi Nishizawa Medal in 2009 and 2013 respectively.[1][3] In 2014, Lin was named a member of Academia Sinica.[5] Upon his retirement from TSMC, he was offered a position on the faculty of National Tsing Hua University.[5][7] References1. ^1 {{cite news |title=ECE Alum Burn Lin receives IEEE Jun-ichi Nishizawa Medal |url=https://ece.osu.edu/news/2013/04/ece-alum-burn-lin-receives-ieee-jun-ichi-nishizawa-medal |accessdate=2 December 2018 |publisher=Ohio State University |date=30 April 2013}} {{authority control}}{{DEFAULTSORT:Lin, Burn-Jeng}}2. ^Burn J. Lin (1987). "The future of subhalf-micrometer optical lithography". Microelectronic Engineering 6, 31–51 3. ^1 {{cite news |last1=Handy |first1=Jim |title=Father of Immersion Litho Receives Award |url=https://www.forbes.com/sites/jimhandy/2013/06/26/father-of-immersion-litho-receives-award/#70fe8c817eee |accessdate=2 December 2018 |work=Forbes |date=26 June 2013}} 4. ^{{cite news |title=Biography: Burn J. Lin |url=https://www.src.org/calendar/e003804/lin-bio/ |accessdate=2 December 2018 |publisher=Semiconductor Research Corporation}} 5. ^1 2 {{cite news |title=Semiconductor Pioneer Burn Lin Joins NTHU |url=http://nthu-en.web.nthu.edu.tw/files/14-1902-106872,r4806-1.php?Lang=zh-tw |accessdate=2 December 2018 |publisher=National Tsing Hua University |date=2016}} 6. ^{{cite news |title=Dr. Burn Jeng Lin |url=https://www.nae.edu/MembersSection/MemberDirectory/31038.aspx |accessdate=2 December 2018 |publisher=United States National Academy of Engineering}} 7. ^{{cite news |title=TSMC Burn Lin Academic Salon |url=http://thoric.web.nthu.edu.tw/files/15-1893-104248,c11356-1.php?Lang=en |accessdate=2 December 2018 |date=2016}} 11 : 1942 births|Living people|Taiwanese engineers|Members of the United States National Academy of Engineering|Members of Academia Sinica|Fellow Members of the IEEE|Fellows of SPIE|Ohio State University alumni|National Tsing Hua University faculty|IBM people|Taiwanese company founders |
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