“MEMS thermal actuator”的意思、由来-开放百科全书

A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or something by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.^[1]^[2]

1. ^{{cite journal |last1=Park |first1=J.S. |last2=Chu |first2=L.L. |last3=Oliver |first3=A.D. |last4=Gianchandani |first4=Y.B. |title=Bent-beam electrothermal actuators-Part II: Linear and rotary microengines |journal=Journal of Microelectromechanical Systems |volume=10 |issue=2 |pages=255–262 |year=2001 |doi=10.1109/84.925774 }}
2. ^{{cite journal |last1=Maloney |first1=J.M. |last2=Schreiber |first2=D.S. |last3=DeVoe |first3=D.L. |title=Large-force electrothermal linear micromotors |journal=J. Micromech. Microeng. |volume=14 |issue=2 |pages=226 |year=2004 |doi=10.1088/0960-1317/14/2/009 |url=http://john.maloney.org/Papers/Large-force_electrothermal_linear_micromotors.pdf}}
3. ^{{cite book |last1=Guckel |first1=H. |last2=Klein |first2=J. |last3=Christenson |first3=T. |last4=Skrobis |first4=K. |last5=Laudon |first5=M. |last6=Lovell |first6=E.G. |chapter=Thermo-magnetic metal flexure actuatorsThermo-magnetic metal flexure actuators |chapterurl=http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=228273 |title=Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest |year=1992 |doi=10.1109/SOLSEN.1992.228273 |pages=73–75 |isbn=978-0-7803-0456-7 }}
4. ^{{cite book |last1=Comtois |first1=J. |last2=Bright |first2=V. |chapter=Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications |title=Technical Digest, 1996 Solid State Sensors and Actuators Workshop |year=1996 |pages=174–7 }}
5. ^{{cite book |last1=Que |first1=L. |last2=Park |first2=J.-S. |last3=Gianchandani |first3=Y.B. |chapter=Bent-beam electro-thermal actuators for high force applications |chapterurl=http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=746747 |title=Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on |year=1999 |doi=10.1109/MEMSYS.1999.746747 |pages=31–36 |isbn=978-0-7803-5194-3 }}
6. ^{{cite book |last=Sinclair |first=M.J. |chapter=A high force low area MEMS thermal actuator |chapterurl=http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=866818 |title=Thermal and Thermomechanical Phenomena in Electronic Systems, 2000. ITHERM 2000. The Seventh Intersociety Conference on |pages=127–132 |year=2000 |doi=10.1109/ITHERM.2000.866818 |isbn=978-0-7803-5912-3 }}

Types of thermal actuators

Other types of MEMS Actuators

References