| 词条 | HARMST |
| 释义 |
HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies, used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching. See also
References{{engineering-stub}} 2 : Materials science|Microtechnology |
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