词条 | Coordinatograph |
释义 |
A coordinatograph is an instrument which mechanically plots X and Y coordinates onto a surface, such as in compiling maps[1] or in plotting control points such as in electronic circuit design. One historic application of a coordinatograph was a machine that precisely placed and cut rubylith to create photomasks for early integrated circuits including some of the earliest generations of the modern PC microprocessor.[2] The coordinatograph produced layout would then be photographically reduced 100:1 to create the production photomask.[3] See also
References1. ^{{cite book|last1=Maling|first1=D. H.|title=Measurements from Maps: Principles and Methods of Cartometry|pages=160–161|date=2013|publisher=Elsevier|isbn=978-0-08-030290-4|url=http://www.elsevier.com/books/measurements-from-maps/maling/978-0-08-030290-4|accessdate=7 January 2015}} 2. ^{{cite journal|last1=Volk|first1=Andrew|last2=Stoll|first2=Peter|last3=Metrovich|first3=Paul|editor1-last=Chao|editor1-first=Lin|title=Recollections of Early Chip Development at Intel|journal=Intel Technology Journal|date=2001|issue=Q1, 2001|pages=10–11|url=http://www.intel.com/content/dam/www/public/us/en/documents/research/2001-vol05-iss-1-intel-technology-journal.pdf|accessdate=7 January 2015|quote="The first chips at Intel used a machine called a “Coordinatograph” to guide cutting of the [rubylith]."}} 3. ^{{cite book |title=From Vacuum Tubes to Nanotubes: An Amazing Half Century: The Emergence of Electronic Circuit Technology 1957-2007 |url=http://anniversary.ipc.org/pdfs/HistoryBook_web.pdf |publisher=IPC |date=2007 |editor-last=Martel |editor-first=Michael L. |last1=Bergman |first1=Dieter |page=113 |quote="(Semiconductor die patterns were usually produced at 100:1 using a scribe-coat coordinatograph where the coating was peeled away to leave the represented IC Pattern)." |deadurl=yes |archiveurl=https://web.archive.org/web/20150107123723/http://anniversary.ipc.org/pdfs/HistoryBook_web.pdf |archivedate=2015-01-07 |df= }} External links
4 : Lithography (microfabrication)|Microtechnology|Semiconductor device fabrication|Semiconductor fabrication equipment |
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